Heterogeneous epitaxy of semiconductors concentrating on the post-Moore period

Heteroepitaxy opens a brand new manner for the heterogeneous integration and multifunctional integration of varied semiconductors within the post-Moore period. Credit score: Institute of Semiconductors

A analysis workforce led by Prof. Liu Zhiqiang from the Institute of Semiconductors of the Chinese language Academy of Sciences, in cooperation with the workforce led by Prof. Gao Peng from Peking College and the workforce led by Prof. Liu Zhongfan from Beijing Graphene Institute (BGI), lately realized the idea of “heterogeneous epitaxy” by way of a van der Partitions technique, a kind of nonsymmetrical epitaxy course of.

The researchers confirmed the feasibility of nitride epitaxy not restricted by the substrate lattice and supplied a brand new thought for the heterogeneous integration of semiconductor supplies.

By proposing a nanorod-assisted van der Waals epitaxy know-how, they achieved steady and flat almost single-crystalline nitride movies on an amorphous glass substrate.

After a long time of growth, the semiconductor trade has entered the “post-Moore period.” “Past Moore’s Legislation” has ushered in a climax. The event of the semiconductor trade sooner or later wants to leap out of the unique framework and search new paths.

Confronted with these alternatives and challenges, the preparation of primary supplies corresponding to vast band-gap semiconductor supplies can also be gestating breakthroughs. New supplies, new processes, and heterogeneous integration will turn out to be probably disruptive applied sciences within the post-Moore period.

On this examine, the researchers used graphene to understand aligned nitride nucleation islands, which inherited crystallinity from the graphene lattice. Then the nitride nucleation islands absorbed adatoms on the graphene floor and advanced into nanorods. Subsequent, nanorods acted as a great template for lattice mismatch alleviation and subsequent coalescence. Thus a clean nitride movie was fashioned.

In accordance with the researchers, graphene successfully guides the orientation of nitrides, whereas the designed nanorod template additional narrows down the in-plane alignment to 3 dominant configurations.

“The in-plane dominant orientations are clearly exhibited by atomic decision high-resolution transmission electron microscopy photos at graphene boundaries, which is in step with density useful idea calculation,” stated Prof. Liu Zhiqiang, corresponding creator of the analysis.

This work not solely experimentally validates the expansion of crystalline nitrides on amorphous substrates, but additionally supplies a promising path to the monolithic integration of semiconductors for superior electronics and photonics.

This technique can also be appropriate for the preparation of excessive Indium part nitride supplies. It proposes a common technique for enhancing the incorporation of Indium in III-nitrides, which opens up new concepts for the longer term utility of nitrides within the discipline of recent and multifunctional units.

This analysis was revealed on-line in Science Advances on July 31 in an article entitled “Van der Waals Epitaxy of Almost Single-Crystalline Nitride Movies on Amorphous Graphene-Glass Wafer.”


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Extra data:
Fang Ren et al, Van der Waals epitaxy of almost single-crystalline nitride movies on amorphous graphene-glass wafer, Science Advances (2021). DOI: 10.1126/sciadv.abf5011

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Chinese language Academy of Sciences


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